Sulfur Hexafluoride

Sulfur hexafluoride (SF₆) is an inorganic, colorless, odorless, non-flammable, extremely potent greenhouse gas, which is an excellent electrical insulator.

Industrial Use

• In semiconductor manufacturing, sulfur hexafluoride is a fluorine source for high-density plasma etching without generating carbon by-products. It can be used for etching metal silicides (specially tungsten etchback), nitrides and oxides versus their metal substrates.
• Sulfur hexafluoride is an insulating material used as a dielectric in electrical transformers.
• It can be used as an inert blanketing agent and as a tracer gas for determining ventilation rates and air movements in buildings.